Evolution Mechanism of Sputtered Film Uniformity with the Erosion Groove Size: Integrated Simulation and Experiment

In this work, Cu thin films were experimentally fabricated at different target–substrate distances by 2-inch and 4-inch circular planar magnetron targets. Meanwhile, the sputtering deposition of Cu thin films was investigated via an integrated multiscale simulation, where the magnetron sputtering di...

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Detalles Bibliográficos
Autores principales: Zhu, Guo, Yang, Yutong, Xiao, Baijun, Gan, Zhiyin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10674600/
https://www.ncbi.nlm.nih.gov/pubmed/38005382
http://dx.doi.org/10.3390/molecules28227660

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10674600/
https://www.ncbi.nlm.nih.gov/pubmed/38005382
http://dx.doi.org/10.3390/molecules28227660

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