Application of 1D ResNet for Multivariate Fault Detection on Semiconductor Manufacturing Equipment †

Amid the ongoing emphasis on reducing manufacturing costs and enhancing productivity, one of the crucial objectives when manufacturing is to maintain process tools in optimal operating conditions. With advancements in sensing technologies, large amounts of data are collected during manufacturing pro...

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Detalles Bibliográficos
Autores principales: Tchatchoua, Philip, Graton, Guillaume, Ouladsine, Mustapha, Christaud, Jean-François
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10675586/
https://www.ncbi.nlm.nih.gov/pubmed/38005487
http://dx.doi.org/10.3390/s23229099

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10675586/
https://www.ncbi.nlm.nih.gov/pubmed/38005487
http://dx.doi.org/10.3390/s23229099

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