A polymeric piezoelectric MEMS accelerometer with high sensitivity, low noise density, and an innovative manufacturing approach

The piezoelectric coupling principle is widely used (along with capacitive coupling and piezoresistive coupling) for MEMS accelerometers. Piezoelectric MEMS accelerometers are used primarily for vibration monitoring. Polymer piezoelectric MEMS accelerometers offer the merits of heavy-metal-free stru...

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Detalles Bibliográficos
Autores principales: Ge, Chang, Cretu, Edmond
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2023
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10684571/
https://www.ncbi.nlm.nih.gov/pubmed/38033989
http://dx.doi.org/10.1038/s41378-023-00628-7

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10684571/
https://www.ncbi.nlm.nih.gov/pubmed/38033989
http://dx.doi.org/10.1038/s41378-023-00628-7

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