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Role of oxygen vacancies in ferroelectric or resistive switching hafnium oxide
HfO(2) shows promise for emerging ferroelectric and resistive switching (RS) memory devices owing to its excellent electrical properties and compatibility with complementary metal oxide semiconductor technology based on mature fabrication processes such as atomic layer deposition. Oxygen vacancy (V(...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer Nature Singapore
2023
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10692067/ https://www.ncbi.nlm.nih.gov/pubmed/38038784 http://dx.doi.org/10.1186/s40580-023-00403-4 |