Comparison of properties of multilayer film sputtered on glass and polypropylene substrates with angular DC magnetron Co-sputtering system

Complex multilayer film structures were fabricated through a custom-built angular DC magnetron co-sputtering system. In this system, separate Cu, Al, and brass (Cu + Zn) targets were mounted on three magnetron guns, working in conjunction with a rotating substrate. This study aimed to compare the pr...

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Detalles Bibliográficos
Autores principales: Changyom, Preecha, Leksakul, Komgrit, Boonyawan, Dheerawan, Premphet, Pongsawat, Vichiansan, Norrapon
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2023
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10692907/
https://www.ncbi.nlm.nih.gov/pubmed/38045136
http://dx.doi.org/10.1016/j.heliyon.2023.e22247

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10692907/
https://www.ncbi.nlm.nih.gov/pubmed/38045136
http://dx.doi.org/10.1016/j.heliyon.2023.e22247

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