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Vapor-Phase Halogenation of Hydrogen-Terminated Silicon(100) Using N-Halogen-succinimides
[Image: see text] The focus of this study was to demonstrate the vapor-phase halogenation of Si(100) and subsequently evaluate the inhibiting ability of the halogenated surfaces toward atomic layer deposition (ALD) of aluminum oxide (Al(2)O(3)). Hydrogen-terminated silicon ⟨100⟩ (H–Si(100)) was halo...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2023
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC10694808/ https://www.ncbi.nlm.nih.gov/pubmed/37965814 http://dx.doi.org/10.1021/acsami.3c13269 |