In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis

Defect inspection plays a critical role in thin film transistor liquid crystal display (TFT-LCD) manufacture, and has received much attention in the field of automatic optical inspection (AOI). Previously, most focus was put on the problems of macro-scale Mura-defect detection in cell process, but i...

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Detalles Bibliográficos
Autores principales: Liu, Yi-Hung, Wang, Chi-Kai, Ting, Yung, Lin, Wei-Zhi, Kang, Zhi-Hao, Chen, Ching-Shun, Hwang, Jih-Shang
Formato: Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2009
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2790120/
https://www.ncbi.nlm.nih.gov/pubmed/20057957
http://dx.doi.org/10.3390/ijms10104498

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2790120/
https://www.ncbi.nlm.nih.gov/pubmed/20057957
http://dx.doi.org/10.3390/ijms10104498

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