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In-TFT-Array-Process Micro Defect Inspection Using Nonlinear Principal Component Analysis

Defect inspection plays a critical role in thin film transistor liquid crystal display (TFT-LCD) manufacture, and has received much attention in the field of automatic optical inspection (AOI). Previously, most focus was put on the problems of macro-scale Mura-defect detection in cell process, but i...

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Detalles Bibliográficos
Autores principales:	Liu, Yi-Hung, Wang, Chi-Kai, Ting, Yung, Lin, Wei-Zhi, Kang, Zhi-Hao, Chen, Ching-Shun, Hwang, Jih-Shang
Formato:	Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2009
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2790120/ https://www.ncbi.nlm.nih.gov/pubmed/20057957 http://dx.doi.org/10.3390/ijms10104498

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