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Vacuum annealing phenomena in ultrathin TiD(y)/Pd bi-layer films evaporated on Si(100) as studied by TEM and XPS
Using a combination of TEM and XPS, we made an analysis of the complex high-temperature annealing effect on ultrathin titanium deuteride (TiD(y)) films evaporated on a Si(100) substrate and covered by an ultrathin palladium layer. Both the preparation and annealing of the TiD(y)/Pd bi-layer films we...
| Autores principales: | , |
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| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Springer-Verlag
2009
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2844534/ https://www.ncbi.nlm.nih.gov/pubmed/19771415 http://dx.doi.org/10.1007/s00216-009-3120-2 |