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Molecular Dynamics Simulations of the Roller Nanoimprint Process: Adhesion and Other Mechanical Characteristics

Molecular dynamics simulations using tight-binding many body potential are carried out to study the roller imprint process of a gold single crystal. The effect of the roller tooth’s taper angle, imprint depth, imprint temperature, and imprint direction on the imprint force, adhesion, stress distribu...

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Detalles Bibliográficos
Autores principales: Wu, Cheng-Da, Lin, Jen-Fin, Fang, Te-Hua
Formato: Texto
Lenguaje:English
Publicado: Springer 2009
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893862/
https://www.ncbi.nlm.nih.gov/pubmed/20596431
http://dx.doi.org/10.1007/s11671-009-9330-x