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Influence of Ni Catalyst Layer and TiN Diffusion Barrier on Carbon Nanotube Growth Rate

Dense, vertically aligned multiwall carbon nanotubes were synthesized on TiN electrode layers for infrared sensing applications. Microwave plasma-enhanced chemical vapor deposition and Ni catalyst were used for the nanotubes synthesis. The resultant nanotubes were characterized by SEM, AFM, and TEM....

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Detalles Bibliográficos
Autores principales: Kpetsu, Jean-Baptiste A, Jedrzejowski, Pawel, Côté, Claude, Sarkissian, Andranik, Mérel, Philippe, Laou, Philips, Paradis, Suzanne, Désilets, Sylvain, Liu, Hao, Sun, Xueliang
Formato: Texto
Lenguaje:English
Publicado: Springer 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893970/
https://www.ncbi.nlm.nih.gov/pubmed/20672089
http://dx.doi.org/10.1007/s11671-010-9544-y