Cargando…
Influence of Ni Catalyst Layer and TiN Diffusion Barrier on Carbon Nanotube Growth Rate
Dense, vertically aligned multiwall carbon nanotubes were synthesized on TiN electrode layers for infrared sensing applications. Microwave plasma-enhanced chemical vapor deposition and Ni catalyst were used for the nanotubes synthesis. The resultant nanotubes were characterized by SEM, AFM, and TEM....
| Autores principales: | , , , , , , , , , |
|---|---|
| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2010
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893970/ https://www.ncbi.nlm.nih.gov/pubmed/20672089 http://dx.doi.org/10.1007/s11671-010-9544-y |