New Colloidal Lithographic Nanopatterns Fabricated by Combining Pre-Heating and Reactive Ion Etching

We report a low-cost and simple method for fabrication of nonspherical colloidal lithographic nanopatterns with a long-range order by preheating and oxygen reactive ion etching of monolayer and double-layer polystyrene spheres. This strategy allows excellent control of size and morphology of the col...

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Detalles Bibliográficos
Autores principales: Cong, Chunxiao, Junus, WilliamChandra, Shen, Zexiang, Yu, Ting
Formato: Texto
Lenguaje:English
Publicado: Springer 2009
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893972/
https://www.ncbi.nlm.nih.gov/pubmed/20628457
http://dx.doi.org/10.1007/s11671-009-9400-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2893972/
https://www.ncbi.nlm.nih.gov/pubmed/20628457
http://dx.doi.org/10.1007/s11671-009-9400-0

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