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Effects of Growth Conditions on Structural Properties of ZnO Nanostructures on Sapphire Substrate by Metal–Organic Chemical Vapor Deposition
ZnO was grown on sapphire substrate by metal–organic chemical vapor deposition using the diethylzinc (DEZn) and oxygen (O(2)) as source chemicals at 500 °C. Influences of the chamber pressure and O(2)/DEZn ratio on the ZnO structural properties were discussed. It was found that the chamber pressure...
| Autores principales: | , , , , |
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| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2009
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894013/ https://www.ncbi.nlm.nih.gov/pubmed/20596413 http://dx.doi.org/10.1007/s11671-009-9257-2 |