Berkovich Nanoindentation on AlN Thin Films

Berkovich nanoindentation-induced mechanical deformation mechanisms of AlN thin films have been investigated by using atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM) techniques. AlN thin films are deposited on the metal-organic chemical-vapor deposition (MOC...

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Detalles Bibliográficos
Autores principales: Jian, Sheng-Rui, Chen, Guo-Ju, Lin, Ting-Chun
Formato: Texto
Lenguaje:English
Publicado: Springer 2010
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894076/
https://www.ncbi.nlm.nih.gov/pubmed/20672096
http://dx.doi.org/10.1007/s11671-010-9582-5

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894076/
https://www.ncbi.nlm.nih.gov/pubmed/20672096
http://dx.doi.org/10.1007/s11671-010-9582-5

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