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Berkovich Nanoindentation on AlN Thin Films

Berkovich nanoindentation-induced mechanical deformation mechanisms of AlN thin films have been investigated by using atomic force microscopy (AFM) and cross-sectional transmission electron microscopy (XTEM) techniques. AlN thin films are deposited on the metal-organic chemical-vapor deposition (MOC...

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Detalles Bibliográficos
Autores principales:	Jian, Sheng-Rui, Chen, Guo-Ju, Lin, Ting-Chun
Formato:	Texto
Lenguaje:	English
Publicado:	Springer 2010
Materias:	Nano Express
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894076/ https://www.ncbi.nlm.nih.gov/pubmed/20672096 http://dx.doi.org/10.1007/s11671-010-9582-5

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