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Structural Evolution During Formation and Filling of Self-patterned Nanoholes on GaAs (100) Surfaces

Nanohole formation on an AlAs/GaAs superlattice gives insight to both the “drilling” effect of Ga droplets on AlAs as compared to GaAs and the hole-filling process. The shape and depth of the nanoholes formed on GaAs (100) substrates has been studied by the cross-section transmission electron micros...

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Detalles Bibliográficos
Autores principales: Sablon, KA, Wang, Zh M, Salamo, GJ, Zhou, Lin, Smith, David J
Formato: Texto
Lenguaje:English
Publicado: Springer 2008
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894181/
https://www.ncbi.nlm.nih.gov/pubmed/20596345
http://dx.doi.org/10.1007/s11671-008-9194-5