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Structural Evolution During Formation and Filling of Self-patterned Nanoholes on GaAs (100) Surfaces
Nanohole formation on an AlAs/GaAs superlattice gives insight to both the “drilling” effect of Ga droplets on AlAs as compared to GaAs and the hole-filling process. The shape and depth of the nanoholes formed on GaAs (100) substrates has been studied by the cross-section transmission electron micros...
| Autores principales: | , , , , |
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| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2008
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894181/ https://www.ncbi.nlm.nih.gov/pubmed/20596345 http://dx.doi.org/10.1007/s11671-008-9194-5 |