Nanoscale Visualization of Elastic Inhomogeneities at TiN Coatings Using Ultrasonic Force Microscopy

Ultrasonic force microscopy has been applied to the characterization of titanium nitride coatings deposited by physical vapor deposition dc magnetron sputtering on stainless steel substrates. The titanium nitride layers exhibit a rich variety of elastic contrast in the ultrasonic force microscopy im...

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Detalles Bibliográficos
Autores principales: Hidalgo, JA, Montero-Ocampo, C, Cuberes, MT
Formato: Texto
Lenguaje:English
Publicado: Springer 2009
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894194/
https://www.ncbi.nlm.nih.gov/pubmed/20652153
http://dx.doi.org/10.1007/s11671-009-9426-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894194/
https://www.ncbi.nlm.nih.gov/pubmed/20652153
http://dx.doi.org/10.1007/s11671-009-9426-3

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