Low Temperature Growth of In(2)O(3)and InN Nanocrystals on Si(111) via Chemical Vapour Deposition Based on the Sublimation of NH(4)Cl in In

Indium oxide (In(2)O(3)) nanocrystals (NCs) have been obtained via atmospheric pressure, chemical vapour deposition (APCVD) on Si(111) via the direct oxidation of In with Ar:10% O(2)at 1000 °C but also at temperatures as low as 500 °C by the sublimation of ammonium chloride (NH(4)Cl) which is incorp...

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Detalles Bibliográficos
Autores principales: Zervos, Matthew, Tsokkou, Demetra, Pervolaraki, Maria, Othonos, Andreas
Formato: Texto
Lenguaje:English
Publicado: Springer 2009
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894321/
https://www.ncbi.nlm.nih.gov/pubmed/20596336
http://dx.doi.org/10.1007/s11671-009-9266-1

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894321/
https://www.ncbi.nlm.nih.gov/pubmed/20596336
http://dx.doi.org/10.1007/s11671-009-9266-1

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