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Continuous and Localized Mn Implantation of ZnO
We present results derived from continuous and localized 35 keV(55)Mn(+)ion implantations into ZnO. Localized implantations were carried out by using self-ordered alumina membranes as masks leading to ordered arrays of implanted volumes on the substrate surfaces. Defects and vacancies in the small i...
Autores principales: | , , , , , |
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Formato: | Texto |
Lenguaje: | English |
Publicado: |
Springer
2009
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2894353/ https://www.ncbi.nlm.nih.gov/pubmed/20596285 http://dx.doi.org/10.1007/s11671-009-9327-5 |