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A Rotating-Tip-Based Mechanical Nano-Manufacturing Process: Nanomilling
We present a rotating-tip-based mechanical nanomanufacturing technique, referred to here as nanomilling. An atomic force microscopy (AFM) probe tip that is rotated at high speeds by out-of-phase motions of the axes of a three-axis piezoelectric actuator is used as the nanotool. By circumventing the...
| Autores principales: | , |
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| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2010
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2920414/ https://www.ncbi.nlm.nih.gov/pubmed/20730128 http://dx.doi.org/10.1007/s11671-010-9653-7 |