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A versatile diffractive maskless lithography for single-shot and serial microfabrication
We demonstrate a diffractive maskless lithographic system that is capable of rapidly performing both serial and single-shot micropatterning. Utilizing the diffractive properties of phase holograms displayed on a spatial light modulator, arbitrary intensity distributions were produced to form two and...
| Autores principales: | , , , , |
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| Formato: | Texto |
| Lenguaje: | English |
| Publicado: |
Optical Society of America
2010
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2920747/ https://www.ncbi.nlm.nih.gov/pubmed/20589036 http://dx.doi.org/10.1364/OE.18.011754 |