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Optimal Growth Conditions for Selective Ge Islands Positioning on Pit-Patterned Si(001)

We investigate ordered nucleation of Ge islands on pit-patterned Si(001) using an original hybrid Kinetic Monte Carlo model. The method allows us to explore long time-scale evolution while using large simulation cells. We analyze the possibility to achieve selective nucleation and island homogeneity...

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Detalles Bibliográficos
Autores principales: Bergamaschini, R, Montalenti, F, Miglio, L
Formato: Texto
Lenguaje:English
Publicado: Springer 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2991238/
https://www.ncbi.nlm.nih.gov/pubmed/21170413
http://dx.doi.org/10.1007/s11671-010-9723-x