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Optimal Growth Conditions for Selective Ge Islands Positioning on Pit-Patterned Si(001)
We investigate ordered nucleation of Ge islands on pit-patterned Si(001) using an original hybrid Kinetic Monte Carlo model. The method allows us to explore long time-scale evolution while using large simulation cells. We analyze the possibility to achieve selective nucleation and island homogeneity...
Autores principales: | Bergamaschini, R, Montalenti, F, Miglio, L |
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Formato: | Texto |
Lenguaje: | English |
Publicado: |
Springer
2010
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC2991238/ https://www.ncbi.nlm.nih.gov/pubmed/21170413 http://dx.doi.org/10.1007/s11671-010-9723-x |
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