The Intrinsic Resolution Limit in the Atomic Force Microscope: Implications for Heights of Nano-Scale Features

BACKGROUND: Accurate mechanical characterization by the atomic force microscope at the highest spatial resolution requires that topography is deconvoluted from indentation. The measured height of nanoscale features in the atomic force microscope (AFM) is almost always smaller than the true value, wh...

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Detalles Bibliográficos
Autores principales: Santos, Sergio, Barcons, Victor, Christenson, Hugo K., Font, Josep, Thomson, Neil H.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Public Library of Science 2011
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3166059/
https://www.ncbi.nlm.nih.gov/pubmed/21912608
http://dx.doi.org/10.1371/journal.pone.0023821

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3166059/
https://www.ncbi.nlm.nih.gov/pubmed/21912608
http://dx.doi.org/10.1371/journal.pone.0023821

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