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The Intrinsic Resolution Limit in the Atomic Force Microscope: Implications for Heights of Nano-Scale Features
BACKGROUND: Accurate mechanical characterization by the atomic force microscope at the highest spatial resolution requires that topography is deconvoluted from indentation. The measured height of nanoscale features in the atomic force microscope (AFM) is almost always smaller than the true value, wh...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Public Library of Science
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3166059/ https://www.ncbi.nlm.nih.gov/pubmed/21912608 http://dx.doi.org/10.1371/journal.pone.0023821 |