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Properties of silicon dioxide layers with embedded metal nanocrystals produced by oxidation of Si:Me mixture
A two-dimensional layers of metal (Me) nanocrystals embedded in SiO(2 )were produced by pulsed laser deposition of uniformly mixed Si:Me film followed by its furnace oxidation and rapid thermal annealing. The kinetics of the film oxidation and the structural properties of the prepared samples were i...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211198/ https://www.ncbi.nlm.nih.gov/pubmed/21711632 http://dx.doi.org/10.1186/1556-276X-6-148 |