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New Si-based multilayers for solar cell applications
In this article, we have fabricated and studied a new multilayer structure Si-SiO(2)/SiN(x )by reactive magnetron sputtering. The comparison between SiO(2 )and SiN(x )host matrices in the optical properties of the multilayers is detailed. Structural analysis was made on the multilayer structures usi...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2011
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211207/ https://www.ncbi.nlm.nih.gov/pubmed/21711661 http://dx.doi.org/10.1186/1556-276X-6-156 |