Cargando…
Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes
In this study, nano-scale honeycomb-shaped structures with anti-reflection properties were successfully formed on SiC. The surface of 4H-SiC wafer after a conventional photolithography process was etched by inductively coupled plasma. We demonstrate that the reflection characteristic of the fabricat...
| Autores principales: | , , , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2011
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211295/ https://www.ncbi.nlm.nih.gov/pubmed/21711744 http://dx.doi.org/10.1186/1556-276X-6-236 |