Characterization of Films with Thickness Less than 10 nm by Sensitivity-Enhanced Atomic Force Acoustic Microscopy

We present a method for characterizing ultrathin films using sensitivity-enhanced atomic force acoustic microscopy, where a concentrated-mass cantilever having a flat tip was used as a sensitive oscillator. Evaluation was aimed at 6-nm-thick and 10-nm-thick diamond-like carbon (DLC) films deposited,...

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Detalles Bibliográficos
Autores principales: Muraoka, Mikio, Komatsu, Shinji
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2010
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211417/
https://www.ncbi.nlm.nih.gov/pubmed/27502656
http://dx.doi.org/10.1007/s11671-010-9778-8

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211417/
https://www.ncbi.nlm.nih.gov/pubmed/27502656
http://dx.doi.org/10.1007/s11671-010-9778-8

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