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Low-temperature fabrication of layered self-organized Ge clusters by RF-sputtering
In this article, we present an investigation of (Ge + SiO(2))/SiO(2 )multilayers deposited by magnetron sputtering and subsequently annealed at different temperatures. The structural properties were investigated by transmission electron microscopy, grazing incidence small angles X-ray scattering, Ru...
Autores principales: | , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Springer
2011
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211430/ https://www.ncbi.nlm.nih.gov/pubmed/21711858 http://dx.doi.org/10.1186/1556-276X-6-341 |