Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography

We have demonstrated simultaneous fabrication of designed defects within a periodic structure. For rapid fabrication of periodic structures incorporating nanoscale line-defects at large area, topographically assisted holographic lithography (TAHL) technique, combining the strength of hologram lithog...

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Detalles Bibliográficos
Autores principales: Choi, Byung-Yeon, Pak, Yusin, Kim, Ki Seok, Lee, Kwang-Ho, Jung, Gun-Young
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2011
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211868/
https://www.ncbi.nlm.nih.gov/pubmed/21749704
http://dx.doi.org/10.1186/1556-276X-6-449

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211868/
https://www.ncbi.nlm.nih.gov/pubmed/21749704
http://dx.doi.org/10.1186/1556-276X-6-449

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