Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film

UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusion...

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Detalles Bibliográficos
Autores principales: Shin, Ju-Hyeon, Lee, Seong-Hwan, Byeon, Kyeong-Jae, Han, Kang-Soo, Lee, Heon, Tsunozaki, Kentaro
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2011
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211878/
https://www.ncbi.nlm.nih.gov/pubmed/21767390
http://dx.doi.org/10.1186/1556-276X-6-458

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211878/
https://www.ncbi.nlm.nih.gov/pubmed/21767390
http://dx.doi.org/10.1186/1556-276X-6-458

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