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Fabrication of flexible UV nanoimprint mold with fluorinated polymer-coated PET film
UV curing nanoimprint lithography is one of the most promising techniques for the fabrication of micro- to nano-sized patterns on various substrates with high throughput and a low production cost. The UV nanoimprint process requires a transparent template with micro- to nano-sized surface protrusion...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3211878/ https://www.ncbi.nlm.nih.gov/pubmed/21767390 http://dx.doi.org/10.1186/1556-276X-6-458 |