Nano-structure fabrication of GaAs using AFM tip-induced local oxidation method: different doping types and plane orientations

In this study, we have fabricated nano-scaled oxide structures on GaAs substrates that are doped in different conductivity types of p- and n-types and plane orientations of GaAs(100) and GaAs(711), respectively, using an atomic force microscopy (AFM) tip-induced local oxidation method. The AFM-induc...

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Detalles Bibliográficos
Autores principales: Ahn, Jung-Joon, Moon, Kyoung-Sook, Koo, Sang-Mo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2011
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3212088/
https://www.ncbi.nlm.nih.gov/pubmed/21978373
http://dx.doi.org/10.1186/1556-276X-6-550

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3212088/
https://www.ncbi.nlm.nih.gov/pubmed/21978373
http://dx.doi.org/10.1186/1556-276X-6-550

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