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Nano-structure fabrication of GaAs using AFM tip-induced local oxidation method: different doping types and plane orientations
In this study, we have fabricated nano-scaled oxide structures on GaAs substrates that are doped in different conductivity types of p- and n-types and plane orientations of GaAs(100) and GaAs(711), respectively, using an atomic force microscopy (AFM) tip-induced local oxidation method. The AFM-induc...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3212088/ https://www.ncbi.nlm.nih.gov/pubmed/21978373 http://dx.doi.org/10.1186/1556-276X-6-550 |