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Iridium wire grid polarizer fabricated using atomic layer deposition
In this work, an effective multistep process toward fabrication of an iridium wire grid polarizer for UV applications involving a frequency doubling process based on ultrafast electron beam lithography and atomic layer deposition is presented. The choice of iridium as grating material is based on it...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2011
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3213227/ https://www.ncbi.nlm.nih.gov/pubmed/22023700 http://dx.doi.org/10.1186/1556-276X-6-558 |