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Study and Evaluation of a PCB-MEMS Liquid Microflow Sensor

This paper presents the evaluation of a miniature liquid microflow sensor, directly integrated on a PCB. The sensor operation is based on the convective heat transfer principle. The heating and sensing elements are thin Pt resistors which are in direct electrical contact with the external copper tra...

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Detalles Bibliográficos
Autores principales: Petropoulos, Anastasios, Kaltsas, Grigoris
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3230946/
https://www.ncbi.nlm.nih.gov/pubmed/22163392
http://dx.doi.org/10.3390/s101008981