Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm(2). The humidity sensor consists of a...

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Detalles Bibliográficos
Autores principales: Yang, Ming-Zhi, Dai, Ching-Liang, Lu, De-Hao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231002/
https://www.ncbi.nlm.nih.gov/pubmed/22163459
http://dx.doi.org/10.3390/s101110095

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231002/
https://www.ncbi.nlm.nih.gov/pubmed/22163459
http://dx.doi.org/10.3390/s101110095

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