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Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip
This study presents the design and fabrication of a capacitive micro humidity sensor integrated with a five-stage ring oscillator circuit on chip using the complimentary metal oxide semiconductor (CMOS) process. The area of the humidity sensor chip is about 1 mm(2). The humidity sensor consists of a...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2010
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231002/ https://www.ncbi.nlm.nih.gov/pubmed/22163459 http://dx.doi.org/10.3390/s101110095 |