Using a Floating-Gate MOS Transistor as a Transducer in a MEMS Gas Sensing System

Floating-gate MOS transistors have been widely used in diverse analog and digital applications. One of these is as a charge sensitive device in sensors for pH measurement in solutions or using gates with metals like Pd or Pt for hydrogen sensing. Efforts are being made to monolithically integrate se...

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Detalles Bibliográficos
Autores principales: Barranca, Mario Alfredo Reyes, Mendoza-Acevedo, Salvador, Flores-Nava, Luis M., Avila-García, Alejandro, Vazquez-Acosta, E. N., Moreno-Cadenas, José Antonio, Casados-Cruz, Gaspar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231016/
https://www.ncbi.nlm.nih.gov/pubmed/22163478
http://dx.doi.org/10.3390/s101110413

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231016/
https://www.ncbi.nlm.nih.gov/pubmed/22163478
http://dx.doi.org/10.3390/s101110413

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