A Tunable Strain Sensor Using Nanogranular Metals

This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID...

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Detalles Bibliográficos
Autores principales: Schwalb, Christian H., Grimm, Christina, Baranowski, Markus, Sachser, Roland, Porrati, Fabrizio, Reith, Heiko, Das, Pintu, Müller, Jens, Völklein, Friedemann, Kaya, Alexander, Huth, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231023/
https://www.ncbi.nlm.nih.gov/pubmed/22163443
http://dx.doi.org/10.3390/s101109847

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231023/
https://www.ncbi.nlm.nih.gov/pubmed/22163443
http://dx.doi.org/10.3390/s101109847

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