Cargando…

A Tunable Strain Sensor Using Nanogranular Metals

This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID...

Descripción completa

Detalles Bibliográficos
Autores principales: Schwalb, Christian H., Grimm, Christina, Baranowski, Markus, Sachser, Roland, Porrati, Fabrizio, Reith, Heiko, Das, Pintu, Müller, Jens, Völklein, Friedemann, Kaya, Alexander, Huth, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231023/
https://www.ncbi.nlm.nih.gov/pubmed/22163443
http://dx.doi.org/10.3390/s101109847
_version_ 1782218125866958848
author Schwalb, Christian H.
Grimm, Christina
Baranowski, Markus
Sachser, Roland
Porrati, Fabrizio
Reith, Heiko
Das, Pintu
Müller, Jens
Völklein, Friedemann
Kaya, Alexander
Huth, Michael
author_facet Schwalb, Christian H.
Grimm, Christina
Baranowski, Markus
Sachser, Roland
Porrati, Fabrizio
Reith, Heiko
Das, Pintu
Müller, Jens
Völklein, Friedemann
Kaya, Alexander
Huth, Michael
author_sort Schwalb, Christian H.
collection PubMed
description This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID) employing the precursor trimethylmethylcyclopentadienyl platinum [MeCpPt(Me)(3)]. We use a cantilever-based deflection technique to determine the sensitivity (gauge factor) of the sensor element. We find that its sensitivity depends on the electrical conductivity and can be continuously tuned, either by the thickness of the deposit or by electron-beam irradiation leading to a distinct maximum in the sensitivity. This maximum finds a theoretical rationale in recent advances in the understanding of electronic charge transport in nano-granular metals.
format Online
Article
Text
id pubmed-3231023
institution National Center for Biotechnology Information
language English
publishDate 2010
publisher Molecular Diversity Preservation International (MDPI)
record_format MEDLINE/PubMed
spelling pubmed-32310232011-12-07 A Tunable Strain Sensor Using Nanogranular Metals Schwalb, Christian H. Grimm, Christina Baranowski, Markus Sachser, Roland Porrati, Fabrizio Reith, Heiko Das, Pintu Müller, Jens Völklein, Friedemann Kaya, Alexander Huth, Michael Sensors (Basel) Article This paper introduces a new methodology for the fabrication of strain-sensor elements for MEMS and NEMS applications based on the tunneling effect in nano-granular metals. The strain-sensor elements are prepared by the maskless lithography technique of focused electron-beam-induced deposition (FEBID) employing the precursor trimethylmethylcyclopentadienyl platinum [MeCpPt(Me)(3)]. We use a cantilever-based deflection technique to determine the sensitivity (gauge factor) of the sensor element. We find that its sensitivity depends on the electrical conductivity and can be continuously tuned, either by the thickness of the deposit or by electron-beam irradiation leading to a distinct maximum in the sensitivity. This maximum finds a theoretical rationale in recent advances in the understanding of electronic charge transport in nano-granular metals. Molecular Diversity Preservation International (MDPI) 2010-11-02 /pmc/articles/PMC3231023/ /pubmed/22163443 http://dx.doi.org/10.3390/s101109847 Text en © 2010 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/. (http://creativecommons.org/licenses/by/3.0/) )
spellingShingle Article
Schwalb, Christian H.
Grimm, Christina
Baranowski, Markus
Sachser, Roland
Porrati, Fabrizio
Reith, Heiko
Das, Pintu
Müller, Jens
Völklein, Friedemann
Kaya, Alexander
Huth, Michael
A Tunable Strain Sensor Using Nanogranular Metals
title A Tunable Strain Sensor Using Nanogranular Metals
title_full A Tunable Strain Sensor Using Nanogranular Metals
title_fullStr A Tunable Strain Sensor Using Nanogranular Metals
title_full_unstemmed A Tunable Strain Sensor Using Nanogranular Metals
title_short A Tunable Strain Sensor Using Nanogranular Metals
title_sort tunable strain sensor using nanogranular metals
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231023/
https://www.ncbi.nlm.nih.gov/pubmed/22163443
http://dx.doi.org/10.3390/s101109847
work_keys_str_mv AT schwalbchristianh atunablestrainsensorusingnanogranularmetals
AT grimmchristina atunablestrainsensorusingnanogranularmetals
AT baranowskimarkus atunablestrainsensorusingnanogranularmetals
AT sachserroland atunablestrainsensorusingnanogranularmetals
AT porratifabrizio atunablestrainsensorusingnanogranularmetals
AT reithheiko atunablestrainsensorusingnanogranularmetals
AT daspintu atunablestrainsensorusingnanogranularmetals
AT mullerjens atunablestrainsensorusingnanogranularmetals
AT volkleinfriedemann atunablestrainsensorusingnanogranularmetals
AT kayaalexander atunablestrainsensorusingnanogranularmetals
AT huthmichael atunablestrainsensorusingnanogranularmetals
AT schwalbchristianh tunablestrainsensorusingnanogranularmetals
AT grimmchristina tunablestrainsensorusingnanogranularmetals
AT baranowskimarkus tunablestrainsensorusingnanogranularmetals
AT sachserroland tunablestrainsensorusingnanogranularmetals
AT porratifabrizio tunablestrainsensorusingnanogranularmetals
AT reithheiko tunablestrainsensorusingnanogranularmetals
AT daspintu tunablestrainsensorusingnanogranularmetals
AT mullerjens tunablestrainsensorusingnanogranularmetals
AT volkleinfriedemann tunablestrainsensorusingnanogranularmetals
AT kayaalexander tunablestrainsensorusingnanogranularmetals
AT huthmichael tunablestrainsensorusingnanogranularmetals