An Analytical Model of Joule Heating in Piezoresistive Microcantilevers

The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers m...

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Detalles Bibliográficos
Autores principales: Ansari, Mohd Zahid, Cho, Chongdu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231039/
https://www.ncbi.nlm.nih.gov/pubmed/22163433
http://dx.doi.org/10.3390/s101109668

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231039/
https://www.ncbi.nlm.nih.gov/pubmed/22163433
http://dx.doi.org/10.3390/s101109668

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