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An Analytical Model of Joule Heating in Piezoresistive Microcantilevers
The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers m...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2010
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231039/ https://www.ncbi.nlm.nih.gov/pubmed/22163433 http://dx.doi.org/10.3390/s101109668 |
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author | Ansari, Mohd Zahid Cho, Chongdu |
author_facet | Ansari, Mohd Zahid Cho, Chongdu |
author_sort | Ansari, Mohd Zahid |
collection | PubMed |
description | The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers made of silicon and silicon dioxide substrates but with the same U-shaped silicon piezoresistor. A theoretical model for predicting the temperature generated due to Joule heating is developed. The commercial finite element software ANSYS Multiphysics was used to study the effect of electrical potential on temperature and deflection produced in the cantilevers. The effect of piezoresistor width on Joule heating is also studied. Results show that Joule heating strongly depends on the applied potential and width of piezoresistor and that a silicon substrate cantilever has better thermal characteristics than a silicon dioxide cantilever. |
format | Online Article Text |
id | pubmed-3231039 |
institution | National Center for Biotechnology Information |
language | English |
publishDate | 2010 |
publisher | Molecular Diversity Preservation International (MDPI) |
record_format | MEDLINE/PubMed |
spelling | pubmed-32310392011-12-07 An Analytical Model of Joule Heating in Piezoresistive Microcantilevers Ansari, Mohd Zahid Cho, Chongdu Sensors (Basel) Article The present study investigates Joule heating in piezoresistive microcantilever sensors. Joule heating and thermal deflections are a major source of noise in such sensors. This work uses analytical and numerical techniques to characterise the Joule heating in 4-layer piezoresistive microcantilevers made of silicon and silicon dioxide substrates but with the same U-shaped silicon piezoresistor. A theoretical model for predicting the temperature generated due to Joule heating is developed. The commercial finite element software ANSYS Multiphysics was used to study the effect of electrical potential on temperature and deflection produced in the cantilevers. The effect of piezoresistor width on Joule heating is also studied. Results show that Joule heating strongly depends on the applied potential and width of piezoresistor and that a silicon substrate cantilever has better thermal characteristics than a silicon dioxide cantilever. Molecular Diversity Preservation International (MDPI) 2010-11-01 /pmc/articles/PMC3231039/ /pubmed/22163433 http://dx.doi.org/10.3390/s101109668 Text en © 2010 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution license (http://creativecommons.org/licenses/by/3.0/. (http://creativecommons.org/licenses/by/3.0/) ) |
spellingShingle | Article Ansari, Mohd Zahid Cho, Chongdu An Analytical Model of Joule Heating in Piezoresistive Microcantilevers |
title | An Analytical Model of Joule Heating in Piezoresistive Microcantilevers |
title_full | An Analytical Model of Joule Heating in Piezoresistive Microcantilevers |
title_fullStr | An Analytical Model of Joule Heating in Piezoresistive Microcantilevers |
title_full_unstemmed | An Analytical Model of Joule Heating in Piezoresistive Microcantilevers |
title_short | An Analytical Model of Joule Heating in Piezoresistive Microcantilevers |
title_sort | analytical model of joule heating in piezoresistive microcantilevers |
topic | Article |
url | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231039/ https://www.ncbi.nlm.nih.gov/pubmed/22163433 http://dx.doi.org/10.3390/s101109668 |
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