Optimal and Robust Design Method for Two-Chip Out-of-Plane Microaccelerometers

In this paper, an optimal and robust design method to implement a two-chip out-of-plane microaccelerometer system is presented. The two-chip microsystem consists of a MEMS chip for sensing the external acceleration and a CMOS chip for signal processing. An optimized design method to determine the de...

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Detalles Bibliográficos
Autores principales: Lee, Sangmin, Ko, Hyoungho, Choi, Byoungdoo, Cho, Dong-il Dan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231064/
https://www.ncbi.nlm.nih.gov/pubmed/22163484
http://dx.doi.org/10.3390/s101210524

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231064/
https://www.ncbi.nlm.nih.gov/pubmed/22163484
http://dx.doi.org/10.3390/s101210524

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