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Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics†
We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be sol...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2010
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231087/ https://www.ncbi.nlm.nih.gov/pubmed/22163518 http://dx.doi.org/10.3390/s101211156 |