Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride

The paper presents a novel pressure sensor based on a silicon nitride (SiN(x)) nanocoated long-period grating (LPG). The high-temperature, radio-frequency plasma-enhanced chemical-vapor-deposited (RF PECVD) SiN(x) nanocoating was applied to tune the sensitivity of the LPG to the external refractive...

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Detalles Bibliográficos
Autores principales: Smietana, Mateusz, Bock, Wojtek J., Mikulic, Predrag, Chen, Jiahua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231098/
https://www.ncbi.nlm.nih.gov/pubmed/22163527
http://dx.doi.org/10.3390/s101211301

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231098/
https://www.ncbi.nlm.nih.gov/pubmed/22163527
http://dx.doi.org/10.3390/s101211301

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