Modeling and Experimental Study on Characterization of Micromachined Thermal Gas Inertial Sensors

Micromachined thermal gas inertial sensors based on heat convection are novel devices that compared with conventional micromachined inertial sensors offer the advantages of simple structures, easy fabrication, high shock resistance and good reliability by virtue of using a gaseous medium instead of...

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Detalles Bibliográficos
Autores principales: Zhu, Rong, Ding, Henggao, Su, Yan, Yang, Yongjun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2010
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231226/
https://www.ncbi.nlm.nih.gov/pubmed/22163655
http://dx.doi.org/10.3390/s100908304

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3231226/
https://www.ncbi.nlm.nih.gov/pubmed/22163655
http://dx.doi.org/10.3390/s100908304

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